TY  - JOUR
AB  - Sub-micron-period surface gratings on Ta2O5 waveguide layers were produced by ablation with a sub-ps-UV-laser. The structure is generated by projection imaging of a primary transmission grating mask. A grating of 500 nm period with a surface modulation depth of 10 nm on a sample area of about 300 µm × 300 µm can be produced with a single laser pulse of about 100 mJ/cm² at 248 nm. Adjustment of the modulation depth to specific requirements can be accomplished by varying laser fluence or pulse number. The structures can be used as grating couplers.
DA  - 1999
DO  - 10.1016/S0169-4332(98)00390-0
KW  - Femtosecond laser
KW  - Micro patterning
KW  - Laser ablation
KW  - Grating
LA  - eng
M2  - 107
PY  - 1999
SN  - 0169-4332
SP  - 107-110
T2  - Applied surface science
TI  - Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation
UR  - https://nbn-resolving.org/urn:nbn:de:0070-pub-17732585
Y2  - 2024-11-22T10:22:20
ER  -