TY  - JOUR
AB  - High resolution in situ imaging of metal surfaces during annealing and/or current transport is of great interest both for the application of metal lines in electronic devices and for extending our basic knowledge of the related complex physical phenomena. Due to its high resolution, the scanning tunneling microscope (STM) is a promising tool for in situ investigations of the structural changes of metals with respect to temperature (annealing) and current transport (electromigration). In this article, the instrumental modifications necessary for in situ scanning tunneling microscopy of heated and/or current carrying thin films under ultrahigh vacuum conditions are discussed. Using results obtained on Ag films, the ability of our STM to image the surface dynamically is demonstrated, while structural changes induced by the current transport are taking place.
DA  - 1993
DO  - 10.1116/1.586709
KW  - Electrophoresis
KW  - Ultrahigh vacuum
KW  - Scanning tunneling microscopy
KW  - Silver scanning
KW  - Images
KW  - Thin films
KW  - Annealing
KW  - Surface structure
LA  - eng
IS  - 1
M2  - 108
PY  - 1993
SN  - 0734-211X
SP  - 108-111
T2  - Journal of Vacuum Science and Technology, B: Microelectronics and Nanometer Structures
TI  - Ultrahigh vacuum scanning-tunneling microscope for in situ studies of annealing and electromigration behavior of thin films
UR  - https://nbn-resolving.org/urn:nbn:de:0070-pub-17753865
Y2  - 2024-11-22T04:33:55
ER  -