TY  - JOUR
DA  - 1994
DO  - 10.1016/0169-4332(94)00114-6
LA  - eng
IS  - 2
M2  - 133
PY  - 1994
SN  - 0169-4332
SP  - 133-140
T2  - Applied Surface Science
TI  - Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS
UR  - https://nbn-resolving.org/urn:nbn:de:0070-pub-17804624
Y2  - 2024-11-22T10:25:31
ER  -