de
en
Schliessen
Detailsuche
Bibliotheken
Projekt
Impressum
Datenschutz
zum Inhalt
Detailsuche
Schnellsuche:
OK
Ergebnisliste
Titel
Titel
Inhalt
Inhalt
Seite
Seite
Im Dokument suchen
Gruhler, Nico ; Gruhler, Matthias Nico: Near-field coupling in hybrid integrated photonic circuits. 2018
Inhalt
Abstract
List of Abbreviations
1 Introduction
2 Silicon Nitride as Basic Passive Integrated Photonics Platform
2.1 Silicon Nitride for On-Chip Photonic Structures
2.1.1 Silicon Nitride Optical Properties
2.1.2 Integrated Optics
2.2 Basic Integrated Photonic Circuits
2.2.1 Ring Resonators
2.2.2 Mach-Zehnder Interferometers
2.2.3 Slot Waveguides
2.3 Fabrication Process for Silicon Nitride Circuits
2.3.1 Electron-Beam Lithography Systems and Resists
2.3.2 Dry Etching
2.4 Characterization of Silicon Nitride Integrated Photonic Devices
2.4.1 Measurement Setup
2.4.2 Coupling of Light to and from Integrated Circuits
2.4.3 Quantification of Propagation Losses with High-Q Ring Resonators
2.4.4 Mach-Zehnder Interferometers
3 Near-Field Coupling to a Collective System: Atom Clad Waveguides
3.1 Properties of a Rubidium Atom Vapor
3.2 Atom-Light Interaction in Integrated Photonics
3.3 Fabrication Adaption for Silicon Nitride Devices Coupled to an Atom Vapor
3.3.1 Silica Window Substrate for a Vacuum Chamber
3.3.2 Borosilicate Glass Substrate for a Vapor Cell
3.4 Simulations of Atom Clad Waveguides
3.5 Measurement Setup for Atom Clad Waveguides
3.6 Experimental Results of the Integrated Atom-Light Interaction
3.6.1 Enhancement of the Grating Coupler Efficiency by Utilizing Metal Mirrors
3.6.2 Atomic Cladding Waveguide Spectroscopy
3.6.3 Mach-Zehnder Interferometers for Measurements of the Induced Phase Shift
3.6.4 Cavity Enhanced Interaction in Ring Resonators
3.6.5 Atom Clad Slot Waveguides
3.7 Summary and Outlook
4 Near-Field Coupling to and from Single Elements
4.1 Coupling to Graphene - 2D Carbon Material
4.2 GaSe Multilayer as Single-Photon Source
4.3 DBT Molecules as Single-Photon Source
4.4 Summary of Further Coupling Schemes Realized on the Si3N4 Platform
4.5 Conclusion
5 Integrated Optics in the Long Wave Infrared Regime
5.1 Introduction to LWIR Photonics and Materials
5.2 Integrated LWIR Photonics Applications
5.3 Silicon as Integrated Photonics Reference Material Platform
5.3.1 Fabrication of Silicon Devices
5.3.2 Characterization of Silicon Devices in the C-band
5.4 Diamond as Integrated Photonics Material Platform
5.4.1 Diamond Properties and Photonic Applications
5.4.2 Fabrication of Diamond Devices
5.4.3 Characterization of Diamond Devices in the NIR Regime
5.4.4 Functionalization of Diamond Circuits
5.5 LWIR Characterization of Silicon and Diamond Devices
5.5.1 LWIR Measurement Setup
5.5.2 Characterization of Silicon Devices
5.5.3 Characterization of Diamond Devices
5.6 Summary and Outlook
6 Conclusion
A Appendix
A.1 Refractive Indices and Dispersion
A.2 Detailed Derivation of Ring Resonator Properties
A.3 Sample Preparation and Fabrication Parameters
A.3.1 Basic Si3N4 Devices
A.3.2 Si3N4 Devices on Silica Window Substrate for a Vacuum Chamber
A.3.3 Si3N4 Devices on Borosilicate Glass Substrate for a Vapor Cell
A.3.4 Basic Silicon Devices
A.3.5 Suspended Silicon Devices for LWIR Applications
A.3.6 Basic Diamond Devices
A.3.7 Diamond on AlN Devices for LWIR Applications
A.3.8 Suspended Diamond Devices for LWIR Applications
A.4 PEC Parameters
A.5 Etching Process Details and Recipes
A.5.1 Si3N4 Etching Process
A.5.2 Etching Recipes
A.6 Wafer Dicing Saw
A.7 Basic Measurement Setup Components
A.8 Simulation Details for Atom Clad Waveguides
A.9 Atom Clad MZIs: Fit Parameters
A.10 Mechanical Facet Polishing
A.11 Details on Optical Components of the LWIR Setup
Bibliography
Zusammenfassung in deutscher Sprache
List of Publications
Curriculum Vitae
Acknowledgments