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Walkenhorst, Sascha: Detection of superparamagnetic beads with TMR sensors. 2007
Inhalt
Introduction
Theory and Basics
Magnetism
Para- and Ferromagnetism
Superparamagnetism
Ferri- and Antiferromagnetism
Diamagnetism
Magnetic Fields
Coils
Permanent Magnets
Magnetic Beads
Tunnel Magnetoresistance
Tunnel Effect
Magnetic Tunnel Junctions
Historical Development
Exchange Bias
Annealing and Field Cooling
Magnetoresistive Biosensors
Application of MR Effects
Detection of (Single) Beads
Characteristics
Thin Films
Magnetron Sputtering
Adhesion
Domains
Stray Fields and Néel Coupling
Shape Anisotropy
Machines
AFM
CLAB and another sputter tool
Cleanroom
MOKE
SEM
SIMS
TMR Measurement Setup
Vacuum Furnace
Exemplary Preparation and Characterization
Preparation
Sputtering
Lithography (e-beam, errors, resists)
Etching
Removing
Examination
Characterization
MOKE Measurements
TMR Measurements
Workflow of TMR Measurements
Selection of Sample
Bead Dilutions
Selection of Solvent
Selection of Concentration
Dropping of Beads
Magnetic Particles on AlOx TMR Sensors
Results of First Sensor Characterization
Results of In-Plane Measurements
OOP Measurements with Coils
Setup
Results
Discussion
OOP Measurements with a Single Permanent Magnet
Setup
Results
Discussion
OOP Measurements using a Stack of Permanent Magnets
Setup
Results
Discussion
Conclusion
Measuring Shape Anisotropy in MTJs with MOKE
Perpendicular Pinning of MgO-Stack using Shape Anisotropy
Application of Perpendicular Pinning on MgO
Analyze in MOKE
Preparation
Provided MgO-Sample (1st Sample)
Sputtered MgO-Stack (2nd Sample)
Results and Discussion
Provided MgO-Sample (1st Sample)
Sputtered MgO-Stack (2nd Sample)
Conclusion
Characterization of MgO TMR Elements
Preparation
Results and Discussion
Summary and Outlook
References
Acknowledgements