Enhancement of the reflectivity of Mo/Si multilayer x-ray mirrors by thermal treatment
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Fabrication and characterization of Si-based soft x-ray mirrors
In: X-ray EUV optics for astronomy, microscopy, polarimetry, and projection lithography, Jg. 1343, S. 64-72Interface Stability and Silicide Formation in High Temperature Stable MoxSi1-x/Si Multilayer Soft X-Ray Mirrors Studied by Means of X-Ray Diffraction and HRTEM
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In: Applied Physics Letters, Jg. 63 H. 16, S. 2207-2209Smoothing of interfaces in ultrathin Mo/Si multilayers by ion bombardment
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In: Applied Physics A: Materials Science and Processing, Jg. 58 H. 4, S. 371-376