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Interface Stability and Silicide Formation in High Temperature Stable MoxSi1-x/Si Multilayer Soft X-Ray Mirrors Studied by Means of X-Ray Diffraction and HRTEM
Kleineberg, U. ; Stock, H. J. ; Kloidt, A. ; Schmiedeskamp, B. ; Heinzmann, Ulrich ; Hopfe, S. ; Scholz, R.
In: Physica status solidi A: applications and materials science, Jg. 145 H. 2, S. 539-550

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